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Electron Interactions with C, F

By Christophorou, L. G.

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Book Id: WPLBN0000660203
Format Type: PDF eBook
File Size: 2.79 MB.
Reproduction Date: 2005
Full Text

Title: Electron Interactions with C, F  
Author: Christophorou, L. G.
Volume:
Language: English
Subject: Technology., Reference materials, Technology and literature
Collections: Techonology eBook Collection
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Christophorou, L. (n.d.). Electron Interactions with C, F. Retrieved from http://hawaiilibrary.net/


Description
Technical Reference Publication

Excerpt
Introduction: In three earlier papers In this series we synthesized, evaluated, and extended the available information on electron collision processes with CF, CHF3, and CC12F2. We have continued this effort to provide the most accurate information available on the electronic interactions of gases of interest to the semiconductor industry, and in this paper we report on perfluoroethane (C2F6, hexafluoroethane). Perfluoroethane is a man-made gas with many applications. It is used in the aluminum industry, in the semiconductor industry, in plasma chemistry and etching application, in pulsed power switching gas mixture and in...

Table of Contents
Contents 1. Introduction ................................ 2. Electronic and Molecular Structure. ............ 3. Electron Scattering. ......................... 3.1. Total Electron Scattering Cross Section, use, t(~)... ............................. 3.2. Momentum Transfer Cross Section (Elastic), urn(&).. ............................... 3.3. Differential Elastic Electron Scattering Cross Section, a,, d i f f ( ~ ) . ................ 3.4. Integral Elastic Electron Scattering Cross Section, u~,~,,~(.E.)... ................... 3.5. Inelastic Elcctron Scattering Cross Scction, qnd(&...)... .......................... 4. Electron-Lmpact Ionization. ................... 4.1. Partial Ionization Cross Section, ui, .. 4.2. Total Ionization Cross Section, ui,t (~)... .... 4.3. Total Dissociation Cross Section, udisst,( ~ ).. 4.4 Ionization Coefficients. .................. 4.4.1. Density-Reduced Ionization 01998 by the U.S. Secretary of Commerce on behalf of the United States. All rights reserva. This copyright is assigned to the American Institute of Physics and the American Chemical Society. Reprints available from ACS; see Reprints List at back of issue. Coefficient, alN.. ................. 4.4.2. Effective Ionization Coefficient, (a- 7)lN.. ...... .,.,.. ........... 4.4.3. (EIN),,. ........................ 4.4.4. Average Energy to Produce an Electron-Ion Pair, W. .............. 5. Electron Impact Ulssoclatlon Producing Neutrals. 6. Electron Attachment. ........................ 6.1. Density-Reduced Electron Attachment Cocfficicnt, 17/N. ....................... 6.2. Total Electron Attachment Rate Constant, ka,, .................................. 6.3. Thermal Value of the Total Electron Attachment Rate Constant, ( k , Jth. ......... 6.4. Total Electron Attachment Cross Section, u , t(&). ............................... 6.5. Dissociative Electron Attachment Fragment Anions ................................ 6.6. Effect of Temperature on k , ,((&)) and u& t(&). ............................... 7. Electron Transport. ......................... 7.1 Electron Drift Velocity, w. ............... 7.2 Ratio of the Transverse Electron Diffusion Coefficient to Electron Mobility, DTIp.. .... 8. Summary of Cross Sections and Coefficients.. ...

 

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