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Applied Physics Letters : Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches

By Z. Olszewski, R. Houlihan, C. Ryan, C. OMahony, and R. Duane

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Book Id: WPLBN0002169182
Format Type: PDF eBook :
File Size: Serial Publication
Reproduction Date: 6 June 2012

Title: Applied Physics Letters : Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches  
Author: Z. Olszewski, R. Houlihan, C. Ryan, C. OMahony, and R. Duane
Volume: Issue : June 2012
Language: English
Subject: Science, Physics, Natural Science
Collections: Periodicals: Journal and Magazine Collection (Contemporary), Applied Physics Letters Collection
Historic
Publication Date:
Publisher: American Institute of Physics

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R. Houlihan, C. Ryan, C. OMahony, And R. Duan, Z. O. (n.d.). Applied Physics Letters : Experimental isolation of degradation mechanisms in capacitive microelectromechanical switches. Retrieved from http://hawaiilibrary.net/


Description
Description: DC and bipolar voltage stresses are used to isolate mechanical degradation of the movable electrode from charging mechanism in microelectromechanical capacitive switches. Switches with different metals as the movable electrode were investigated. In titanium switches, a shift in the pull-in voltages is observed after dc stressing whereas no shift occurs after the bipolar stressing, which is to be expected from charging theory. On switches with similar dielectric but made of aluminium, the narrowing effect occurs regardless if dc or bipolar stressing is used, which indicates the mechanical degradation as the mechanism responsible.

 

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