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Review of Scientific Instruments : Nanoscale lithography with frequency-modulation atomic force microscopy

By Masayuki Hamada, T. Eguchi, K. Akiyama, and Y. Hasegawa

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Book Id: WPLBN0002169700
Format Type: PDF eBook :
File Size: Serial Publication
Reproduction Date: 12 December 2008

Title: Review of Scientific Instruments : Nanoscale lithography with frequency-modulation atomic force microscopy  
Author: Masayuki Hamada, T. Eguchi, K. Akiyama, and Y. Hasegawa
Volume: Issue : December 2008
Language: English
Subject: Science, Physics, Natural Science
Collections: Periodicals: Journal and Magazine Collection (Contemporary), Review of Scientific Instruments Collection
Historic
Publication Date:
Publisher: American Institute of Physics

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T. Eguchi, K. Akiyama, And Y. Hasegaw, M. H. (n.d.). Review of Scientific Instruments : Nanoscale lithography with frequency-modulation atomic force microscopy. Retrieved from http://hawaiilibrary.net/


Description
Description: A lithographic method to draw nanoscale structures by repetitive depositions of the tip material by field evaporation has been developed based on frequency-modulation atomic force microscopy (FM-AFM). Because of high stiffness of quartz tuning forks, a force sensor in the AFM, unwanted mechanical contact of the AFM tip with the substrate was prevented. Precise control of the tip-substrate gap distance with FM-AFM and a gold tip sharpened with focused ion beam enable us to deposit gold dots as small as ∼ 20 nm in size and construct nanoscale patterns.

 

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